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Mass flow meters for gases and gas mixtures

Alicat units allow you to measure mass flow, volumetric flow, pressure and temperature simultaneously. If you choose the units with the integrated valves, you can also control flow or pressure with the same device.

Choose one of up to 130 gas calibration curves which are already pre-installed or define your own gax mix using COMPOSER™ software. If you change the gas or gas components you will immediately measure with the same accuracy, without applying avarage factors or sending the device for a new calibration.

Mass flow controllers provide a constant flow in your process

Alicat-controller have extremly quick reacting valves. The controll times of 50…100 ms allow highly accurate dosing and leakage control.Pressure deviations are controlled in real time and make sure that your flow is always constant. This will save you time and cost in your process.

Making You Faster

  • Numerous user-selectable engineering units.
  • Includes COMPOSER™ gas composition firmware.
  • Extreme quick response time: 10 ms for meters, 50…100 ms for controllers.
  • No warm-up required: ready to operate in one second.
  • Stand-alone unit: no need for computer or PLC.
  • All flow data visible on one screen (metering mass flow, volumetric flow, absolute pressure, temperature).
  • Digital and analog outputs.
  • network integration by RS232 / RS485 and different bus protocols
  • For controllers: easy to handle valve adjustment

Common Mass Flow Metering Instrument Options

  • High-accuracy calibration (HC option), permits use of the mass flow meter as a secondary transfer standard.
  • Bidirectional flow calibration, enables full-scale readings in both flow directions.
  • Integrated flow totalizer, provides cumulative readings of total quantity flowed over time.
  • CSA Class 1 Division 2 (ATEX Zone 2) Area Classification, permits operation in hazardous environments.
  • 9-pin or 15-pin D-sub connectors, configured to match any existing pinout.
  • Modbus-RTU, available over RS-232 or RS-485. PROFIBUS also available.
  • Backlit color display, shines in low lighting environments.

Mass Flow Meter M Standard Series

Massendurchflussmesser: M Standard Serie
The Alicat M-Series Mass Flow Meter is a digital / analog meter. It is an accurate, repeatable and customizable mass flowmeter suitable for a variety of applications. Our patented laminar flow technology provides very fast and linear mass flow measurement over a wide range of 200: 1 at flow rates of 2.5 microliters per minute to 5000 liters per minute.
M Spezifikations

Mass Flow Meter MW Low Pressure Drop Series

Mass flow meter: Alicat MW Whisper series mass flow meter
Minimize system impact while measuring mass flow! With pressure drops as low as 4 mbar (0.06 psid) at full-scale flows, mass flow meters in the Alicat “Whisper” Series enable flow measurement at near-atmospheric pressures, perfect for aerospace and environmental gas analysis applications. Max range: 0-500 slpm.
MW Specs Go to Whisper Mass Flow Meters.

Mass Flow Meters for High Pressure Systems MQ Series

Mass flow meter for high pressure applications: Alicat MQ-series
For high pressure applications, Alicat’s MQ series meters handle ranges between 30 PSIA and 320 PSIA (1.03 to 22 bar). These meters offer the great Alicat flexibility of 98 full calibration gases (with 20 custom mix slots), multivariate display and digital plus analog communications which are standard on our core products. Check the specifications for explicit compatibilities.
MQ Specs

Mass Flow Meter Anti-Corrosive MS Series

mass flow meter Alicat MS-series for corrosive gases
Mass flow meters in the MS Series withstand corrosion caused by aggressive gases such as NH3, H2S and SiH4 with durable 316L stainless steel. All ranges available. Click the “Quick Specs” tab for a listing of included corrosive gas calibrations.
MS Specs

Portable Calibration Series MB and PCU

Portable mass flow calibrator with optional backlit color display from Alicat
Integrated rechargeable lithium-ion batteries make for laboratory-grade flow verification that you can take with you anywhere. May be customized as “Whisper” (MWB) or anti-corrosive (MBS) portable mass flow calibrators. Alicat’s Portable Calibration Unit (PCU) houses three mass flow meters in a single battery-powered case for the widest possible calibration range. Click here for more information about our portable meters and calibrators.
MB Specs            PCU Specs

Standard MC Series Mass Flow Controller

Alicat MC-series mass flow controller
Control responsively and stably with the fastest mass flow controller in the world. Maintain speed and accuracy at flows as low as 2.5 microliters per minute or as high as 50 slpm. Custom orifice sizing enables us to tailor-select a valve to satisfy your application and performance requirements.
MC Specs

High-Flow Massflow Controller MCR Series

Mass Flow Controller: Alicat MCR-series high-flow mass flow controller
Maintain speed and accuracy at high flows (50-5000 slpm). Alicat is the world’s only manufacturer of near-frictionless rolamite valves for precise control of high-rate gas flows. Proprietary orifice patterns enable us to customize a rolamite to satisfy your application and performance requirements.
MCR Specs MCP Specs (for inlet pressures less than 80 psig)

Low Pressure Drop Mass Flow Controller MCW/MCRW “Whisper” Series

Alicat MCRW high-flow Whisper series mass flow controller
Mass flow controllers that minimize system impact with pressure drops as low as 4 mbar (0.06 psid) at full-scale flows. Alicat “Whisper” Series controllers enable flow control at near-atmospheric pressures, perfect for aerospace and environmental gas analysis applications. Max range: 0-500 slpm.
MCW Specs

Mass Flow Controller for High Pressure Systems MCQ/MCRQ Series

Mass flow controller for high pressure applications: Alicat MCQ-series
For high pressure applications, Alicat’s MCQ series controllers handle ranges between 30 PSIA and 320 PSIA (1.03 to 22 bar). These controllers offer the great Alicat flexibility of 98 full calibration gases (with 20 custom mix slots), multivariate display and digital plus analog communications which are standard on our core products. Check the specifications for explicit compatibilities.
MCQ Specs

Anti-Corrosive Mass Flow Controller MCS/MCRS Series

Mass flow controller for aggressive gases: Alicat MCS-series
A flow controller manufactured to withstand corrosion caused by aggressive gases such as NH3, H2S and SiH4 with durable 316L stainless steel. All ranges available. Click the “Quick Specs” tab for a listing of included corrosive gas calibrations.
MCS Specs

Bidirectional Mass Flow Controller MCD/MCRD Series

Bidirectional mass flow controller: MCD-Series from Alicat
Control flow in both directions with the world’s first bidirectional mass flow controller. May be customized as “Whisper” (MCDW) or anti-corrosive (MCDS) controller. All ranges available.
MCD Specs Go to MCD page.

SEMI-Standard Mass Flow Controller MCE Series

Mass flow controller with SEMI footprint: Alicat MCE-series
Upgrade aging or underperforming thermal flow controllers with Alicat’s MCE, an easy drop-in replacement with comparable form, fit and function. We can match any manufacturer’s pinout configuration to ensure compatibility with your control system. Enclosed valve design and fittings conform to SEMI International Standards. Max range: 0-20 slpm. Also available with 316L stainless steel construction (MCES series).
Download Brochure MCE Specs

Vacuum Mass Flow Controllers MCV Series

Mass flow controller for vacuum - Alicat MCV-Series
The MCV Series mass flow controller for vacuum applications starts with an MCE (above) and adds an integrated pneumatic shut-off valve to prevent contamination during zero setpoint conditions. Max range: 0-20 slpm. Also available with 316L stainless steel construction (MCVS series).
Download Brochure MCV Specs